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Rapid Thermal Processing – Addresses several applications with an extended range of temperature and vacuum capability

Our supplied versatile range of Rapid Thermal Processing systems are capable of processing samples of a few mm² to up to 200 mm diameter along with manual loading or cassette to cassette robot handling for production, which includes customized solutions which are needed for processing compound semiconductor wafer with susceptors.

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Rapid Thermal Processing
Testing & Characterization
Rapid Thermal Processing

With a quick heating up of the wafer into a set high temperature and again cooling it down, the creation or activation of the semiconducting channel at the heart of each transistor is done by selectively turning the top few atomic layers to a semiconductor from an insulator. By the name of RTP or rapid the...