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Modular PVD Systems
Modular PVD Systems

Modular PVD Systems

Versatile Solutions for High-Precision Thin Film Deposition

Explore a robust range of Modular PVD Systems designed to support a wide spectrum of research and production requirements. These systems deliver unmatched flexibility across deposition methods including magnetron sputtering, thermal evaporation, LTE, and e-beam evaporation. With cleanroom compatibility, glovebox integration, and modular configurations, the MiniLab series ensures reliable performance in demanding high-vacuum environments.
Ideal for the deposition of metals, dielectrics, and organics, each system in this lineup is engineered for consistent results, operational efficiency, and user-friendly control. Backed by intelligent interfaces and a variety of upgrade options, these tools fit seamlessly into any advanced laboratory or industrial workflow.

 

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Modular PVD Systems

MiniLab 026

Compact. Glovebox Compatible. Ideal for Multi-Technique Labs.

The MiniLab 026 is a space-efficient PVD tool with a smart clamshell design. Perfect for labs working with metals, inorganics, or organics, it supports evaporation and sputtering techniques in a glovebox-compatible footprint.

Highlights:

  • Compact, floor-standing build
  • Optimized for magnetron sputtering or thermal evaporation
  • Handles substrates up to 6" diameter
  • Touchscreen control & PC interface
  • Easy retrofitting to existing gloveboxes
  • Proven performance for R&D environments

Popular Add-ons:

  • Rotary or scroll backing pumps
  • Quartz crystal sensor heads for rate/thickness monitoring
  • Heating, rotation, Z-shift stages
  • Motorized or pneumatic shutters

MiniLab 070

Built for Larger Substrates and Scalable Sputtering

The MiniLab 070 is a front-loading, box-type system ideal for larger substrates up to 11”. Designed for magnetron sputtering, this system offers extensive flexibility from basic to fully-automated multi-technique setups.

Highlights:

  • Up to 4 deposition sources
  • Turbomolecular and cryo pumping systems
  • Modular configuration for maximum flexibility
  • Planetary stage and bias options available
  • Load-lock compatibility for sample protection
  • Cleanroom-ready with integrated safety features

Tailor Your Tool:

  • Single/multi-sample load-locks
  • Touchscreen or manual operation
  • Source & substrate shutters
  • Advanced pressure/gas control via MFCs

MiniLab 080

Tall-Chamber System for Lift-Off Perfection

When your process demands long working distances and near-perfect uniformity, the MiniLab 080 delivers. Optimized for thermal, LTE, and e-beam evaporation, it’s an ideal choice for lift-off and uniform coating applications.

Highlights:

  • D-shaped tall vacuum chamber for optimal material distribution
  • Supports up to 6 sources and 11” substrates
  • Excellent for uniform coatings and angle-dependent applications
  • Easily adaptable for magnetron sputtering
  • Fully automated or manual control options

Add-ons That Matter:

  • Quartz crystal sensors for real-time rate/thickness monitoring
  • Bias stages and planetary motion
  • Load-locks for uninterrupted sample exchange
  • Cryogenic or turbomolecular vacuum options

MiniLab 090

Atmosphere-Sensitive Deposition Made Easy

The MiniLab 090 is built for glovebox integration, making it ideal for sensitive environments like OLED or perovskite research. Its tall chamber supports high-performance evaporation and magnetron sputtering techniques.

Highlights:

  • Front and rear access for glovebox compatibility
  • Designed for 11” substrates
  • Multiple deposition techniques in a single tool
  • Rear service access without compromising glovebox integrity
  • Touchscreen PC interface for simplified operation

Customization Options:

  • Manual or automated control systems
  • Heating, cooling, and Z-shift stages
  • Pneumatic or motorized shutters
  • High-vacuum cryo or turbo pump integration

MiniLab 125

Multi-Technique Powerhouse for Advanced Labs

When versatility is key, the MiniLab 125 leads the way. Designed for advanced, multi-technique applications, it combines magnetron sputtering and thermal evaporation in one platform.

Highlights:

  • Supports up to 11” substrates
  • Highly flexible tool configurations
  • Touchscreen PC interface with automated recipe control
  • Ideal for research institutions and pilot-scale production
  • Easy to maintain, cleanroom-ready, and built for performance

Go Further with Options:

  • Planetary, rotation, bias, Z-shift stages
  • Rate/thickness monitoring via quartz crystal sensors
  • Load-locks for increased throughput
  • Advanced vacuum and gas handling solutions

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