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hBN CVD System
hBN CVD System

hBN CVD System

Dual-Purpose Thermal CVD for Hexagonal Boron Nitride & Graphene

Built for today’s 2D material pioneers, the planarGROW-2S-BN is a compact, horizontal hot-wall CVD reactor designed specifically for h-BN film synthesis —while also supporting graphene growth in a single, integrated system. Whether you're working with liquid borazine or solid ammonia borane, this system handles both precursors with precision and safety, making it an excellent fit for advanced research environments.

Ideal for labs exploring next-gen dielectric materials, hybrid structures, and monolayer synthesis, this unit delivers dependable performance, recipe control, and sample repeatability—all in a compact footprint.

 

Enquiry

Get full command of your process with an integrated Graphical User Interface (GUI) that simplifies operation.
Adjust gas flow, monitor furnace temperature, save your recipes, and activate auto mode for consistent, unattended growth cycles—
all with a user-friendly dashboard built for labs.

 

Designed based on the proven methodology of top researchers, including Prof. Ki Kang Kim, this system has contributed to multiple peer-reviewed publications.
Whether you’re growing h-BN on copper or nickel, the planarGROW-2S-BN is proven to deliver high-quality monolayers and thin films,
ready for electronic, optical, or dielectric applications.

 

Features

  • 2" Quartz Tube Configuration – ф50x1000mm
  • Max Temp: 1,100°C via Kanthal wire heater
  • Flexible Precursor Input – Supports both borazine (liquid) & ammonia borane (solid)
  • Dual Material Capability – Switch between h-BN and graphene synthesis
  • Four MFC Channels – H₂, CH₄, Ar, N₂ with 5th port available
  • Integrated Vapor Feed & Chiller System – Reliable source delivery for boron precursors
  • Vacuum Control – Varian dry pump, roughing valves, bypass system
  • Software-Controlled – LabVIEW-based GUI with recipe storage and 1-click auto run
  • Cold Trap, Water-Cooled Flanges & Interlocks – Safety and longevity built in
  • Compact Footprint: 1.75m x 1.60m x 0.75m (W x H x D)
  • Power Supply: 220V, 3-phase, 30A

Contact Us at +9714 2152799

We can help you with a solution tailor to your specific need.