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Chemical vapour Deposition for Graphene
Chemical vapour Deposition for Graphene

Chemical vapour Deposition for Graphene

High-Precision Thermal CVD for Graphene and CNT Growth

The planarGROW series offers a powerful and flexible platform for thermal CVD-based graphene synthesis . Engineered for advanced research and production environments, this horizontal hot-wall reactor system supports both graphene and carbon nanotube (CNT) growth (with minor modifications). Available in three standard configurations — planarGROW-2B, planarGROW-4S, and planarGROW-6E — each model is fully customizable to match specific user requirements.

 

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Chemical vapour Deposition for Graphene

A featured mid-size configuration in the series, planarGROW-4S is equipped for efficient, repeatable graphene growth using a horizontal quartz tube reactor. Ideal for research institutes and advanced materials labs, this system combines precise gas flow control, vacuum management, and thermal processing with an intuitive software interface.

System Highlights

  • Max Temperature: 1,100°C
  • Tube Size: 100 mm Ø x 1200 mm (Primary Quartz Tube)
  • Heater: Kanthal wire with glass wool molding
  • Zone: 1-zone movable furnace for rapid cooling post-synthesis
  • Software: LabVIEW-based GUI with auto-process mode & recipe management
  • Gas Flow: 3 standard MFCs (H₂, CH₄, Ar) with expansion port
  • Vacuum Control: Rotary pump, pressure gauges, and throttle valve
  • Cooling: Water-cooled flanges
  • Control Interface: Embedded PC with LabVIEW integration
  • Dimensions: 1.75m (W) x 1.60m (H) x 0.75m (D), approx. 200 kg

 

The 4” quartz tube allows large-scale Cu foil loading, but for enhanced performance and extended tube lifespan, using 1.5” or 2” carrier tubes is recommended. This setup supports multi-sample parallel processing and reduces contamination. Typical synthesis can be completed within ~120 minutes, with actual duration depending on recipe complexity.

The software-controlled, movable furnace enables fast cool-down cycles by automatically retracting after synthesis, improving throughput and sample quality.

Software Interface – Full Control at Your Fingertips

The user-friendly GUI, built on National Instruments LabVIEW, offers complete control of the system.

  • Monitor and adjust temperatures, gas flows, and pressures
  • Save and load custom recipes
  • Enable auto-process for unattended operation
  • Control via embedded PC and touch display

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